Characterization of porous low-k dielectric films by using positron annihilation

Uedono, AkiraAkiraUedonoArmini, SilviaSilviaArminiKrause-Rehberg, RRKrause-RehbergWagner, AAWagner2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31989Characterization of porous low-k dielectric films by using positron annihilationMeeting abstract