Photonic nanostructures for Si solar cells: two etching techniques and their impact on lifetimes and contacting

Trompoukis, ChristosChristosTrompoukisStesmans, AndreAndreStesmansSimoen, EddyEddySimoenAbdo, IslamIslamAbdoTous, LoicLoicTousDepauw, ValerieValerieDepauwLee, KidongKidongLeeEl Daif, OunsiOunsiEl DaifGordon, IvanIvanGordonMertens, RobertRobertMertensPoortmans, JefJefPoortmans2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/26014Photonic nanostructures for Si solar cells: two etching techniques and their impact on lifetimes and contactingProceedings paper