EFTEM as a porosity metrology tool for low-k dielectrics

Hens, S.S.HensBender, HugoHugoBenderVan Landuyt, J.J.Van LanduytIacopi, FrancescaFrancescaIacopiWeidner, K.K.WeidnerMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6381EFTEM as a porosity metrology tool for low-k dielectricsProceedings paper