Ion implantation for low-resistive source/drain contacts in FinFET devices

Van Dal, MarkMarkVan DalDuffy, RayRayDuffyPawlak, BartekBartekPawlakCollaert, NadineNadineCollaertJurczak, GosiaGosiaJurczakLander, RobRobLander2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14619Ion implantation for low-resistive source/drain contacts in FinFET devicesProceedings paper