Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves

Urbanowicz, AdamAdamUrbanowiczMeshman, BorisBorisMeshmanSchneider, DieterDieterSchneiderBaklanov, MikhaïlMikhaïlBaklanov2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13006Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic wavesProceedings paper