Self-aligned CoSi2 for 0.18mm and below

Maex, KarenKarenMaexLauwers, A.A.LauwersBesser, PaulPaulBesserKondoh, EiichiEiichiKondohde Potter de ten Broeck, MurielMurielde Potter de ten BroeckSteegen, AnAnSteegen2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3645Self-aligned CoSi2 for 0.18mm and belowJournal article