CMOS-compatible tungsten heaters for silicon photonic waveguides

Masood, AdilAdilMasoodPantouvaki, MariannaMariannaPantouvakiGoossens, DannyDannyGoossensLepage, GuyGuyLepageVerheyen, PeterPeterVerheyenVan Thourhout, DriesDriesVan ThourhoutAbsil, PhilippePhilippeAbsilBogaerts, WimWimBogaerts2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21118CMOS-compatible tungsten heaters for silicon photonic waveguidesProceedings paper