Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations

van Spengen, MerlijnMerlijnvan SpengenPuers, BobBobPuersMertens, RobertRobertMertensDe Wolf, IngridIngridDe Wolf2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9794Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrationsJournal article