Goethals, MiekeMiekeGoethalsGronheid, RoelRoelGronheidLeunissen, PeterPeterLeunissenVan Roey, FriedaFriedaVan RoeySolak, HarunHarunSolak2021-10-162021-10-162005-06https://imec-publications.be/handle/20.500.12860/10503EUV resist screening: current performance and issuesJournal article