Controlled boron content in lightly B-doped single crystal diamond films by variation of methane concentration

Rouzbahani Bayatani, RozitaRozitaRouzbahani BayataniPobedinskas, PauliusPauliusPobedinskasDonatini, FabriceFabriceDonatiniWong, DenizDenizWongPernot, JulienJulienPernotHaenen, KenKenHaenen2025-04-172024-04-102024-05-302024-06-132025-04-1720240008-6223WOS:001197066900001https://imec-publications.be/handle/20.500.12860/43809Controlled boron content in lightly B-doped single crystal diamond films by variation of methane concentrationJournal article10.1016/j.carbon.2024.118923WOS:001197066900001XPS SPECTRAGROWTH-RATECVDSURFACECATHODOLUMINESCENCEACCEPTORMORPHOLOGYDIODES