Boeckx, CarolienCarolienBoeckxDoise, JanJanDoiseChan, BTBTChanDe Gendt, StefanStefanDe GendtRincon Delgadillo, PaulinaPaulinaRincon Delgadillo2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27870Process optimization and variability improvement of contacts using grapho-epitaxy DSAProceedings paper