Murota, JunichiJunichiMurotaLoo, RogerRogerLooTillack, BerndBerndTillackLe Thanh, VinVinLe ThanhChiussi, StefanoStefanoChiussiHirayama, MakotoMakotoHirayamaNiwano, MichioMichioNiwano2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27057EI4GroupIV: Excellence Initiative for New Group IV semiconductor materials & processingMeeting abstract