High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.J.A.van den BergReading, M.A.M.A.ReadingParisini, A.A.ParisiniKolbe, M.M.KolbeBeckhoff, B.B.BeckhoffLadas, S.S.LadasPetrik, P.P.PetrikBailey, P.P.BaileyNoakes, T.T.NoakesConard, ThierryThierryConardDe Gendt, StefanStefanDe Gendt2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16363High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPSMeeting abstract