Effect of top electrode deposition conditions on the reliability of Tt/PZT/Pt ferroelectric capacitors

Wouters, DirkDirkWoutersBartic, AndreiAndreiBarticNorga, GerdGerdNorgaMaes, HermanHermanMaes2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/4032Effect of top electrode deposition conditions on the reliability of Tt/PZT/Pt ferroelectric capacitorsOral presentation