EM-induced mass transport at the Cu/barrier interface: a new test structure for rapid assessment at user conditions

Bruynseraede, ChristopheChristopheBruynseraedeChiaradia, DavidDavidChiaradiaWang, HuiHuiWangMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7264EM-induced mass transport at the Cu/barrier interface: a new test structure for rapid assessment at user conditionsProceedings paper