Wong, PatrickPatrickWongDe Bisschop, PeterPeterDe BisschopVandenbroeck, NadiaNadiaVandenbroeckWiaux, VincentVincentWiauxVan de Kerkhove, JeroenJeroenVan de KerkhoveRobertson, StewartStewartRobertsonBiafore, JohnJohnBiafore2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21860Litho 1-litho 2 proximity differences for s LELE and LPLE double patterning processesProceedings paper