Bogaerts, WimWimBogaertsDumon, PieterPieterDumonVan Campenhout, JorisJorisVan CampenhoutWiaux, VincentVincentWiauxWouters, Johan M. D.Johan M. D.WoutersBeckx, StephanStephanBeckxTaillaert, DirkDirkTaillaertLuyssaert, BertBertLuyssaertVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-152021-10-152003-10https://imec-publications.be/handle/20.500.12860/7231Deep UV lithography for planar photonic crystal structuresProceedings paper