Dekkers, HaroldHaroldDekkersDuerinckx, FilipFilipDuerinckxSzlufcik, JozefJozefSzlufcikNijs, JohanJohanNijs2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4306Silicon surface texturing in a chlorine plasmaProceedings paper