Eyben, PierrePierreEybenWerner, ThiloThiloWernerHantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeLorenz, AnneAnneLorenzJohn, JoachimJoachimJohnHorzel, JörgJörgHorzelVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18893Two-dimensional analysis of Al and B back surface field using scanningProceedings paper