Modelling mobility degradation due to remote Coulomb scattering from dielectric charges and its impact on MOS device performance

Lujan, GuilhermeGuilhermeLujanMagnus, WimWimMagnusRagnarsson, Lars-AkeLars-AkeRagnarssonKubicek, StefanStefanKubicekDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsDe Meyer, KristinKristinDe Meyer2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10807Modelling mobility degradation due to remote Coulomb scattering from dielectric charges and its impact on MOS device performanceJournal article