Finders, JoJoFindersPotoms, GoedeleGoedelePotomsRonse, KurtKurtRonseVan den hove, LucLucVan den hoveVan Driessche, VeerleVeerleVan DriesscheTzviatkov, PlamenPlamenTzviatkovBruggeman, B.B.BruggemanCaligiore, A.A.Caligiore2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1881SEM proximity effect for poly gate patternsJournal article