SiGe channel technology: superior reliability toward ultra-thin EOT devices – Part II: time-dependent variability in nanoscaled devices and other reliability issues

Franco, JacopoJacopoFrancoKaczer, BenBenKaczerToledano Luque, MariaMariaToledano LuqueRoussel, PhilippePhilippeRousselKauerauf, ThomasThomasKaueraufMitard, JeromeJeromeMitardWitters, LiesbethLiesbethWittersGrasser, TiborTiborGrasserGroeseneken, GuidoGuidoGroeseneken2021-10-212021-10-2120130018-9383https://imec-publications.be/handle/20.500.12860/22365SiGe channel technology: superior reliability toward ultra-thin EOT devices – Part II: time-dependent variability in nanoscaled devices and other reliability issuesJournal article