Low-damage cryogenic etch of porous organosilicate low-k dielectric

Zhang, LipingLipingZhangGoodyear, AndyAndyGoodyearCooke, MikeMikeCookede Marneffe, Jean-FrancoisJean-Francoisde MarneffeDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26242Low-damage cryogenic etch of porous organosilicate low-k dielectricMeeting abstracthttp://mne2015.org/wp-content/uploads/2015/09/pdf/Thu-B2-c4.pdf