Armini, SilviaSilviaArminiSwerts, JohanJohanSwertsSiew, Yong KongYong KongSiewVereecken, PhilippePhilippeVereeckenBoemmels, JuergenJuergenBoemmelsStruyf, HerbertHerbertStruyfTokei, ZsoltZsoltTokei2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/21983Challenges for scaled damascene interconnectsMeeting abstracthttp://ma.ecsdl.org/content/MA2013-02/32/2057.abstract