Hendrickx, EricEricHendrickxBirkner, RobertRobertBirknerKempsell, MonicaMonicaKempsellTritchkov, AlexanderAlexanderTritchkovRichter, RigoRigoRichterVandenberghe, GeertGeertVandenbergheScheruebl, ThomasThomasScheruebl2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13855AIMS TM 45 inspection of CH treated with inverse lithographyProceedings paper