A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon

Docherty, F.T.F.T.DochertyMacKenzie, M.M.MacKenzieCraven, A.J.A.J.CravenMcComb, D.W.D.W.McCombDe Gendt, StefanStefanDe GendtMcFadzean, S.S.McFadzeanMcGilvery, C.M.C.M.McGilvery2021-10-172021-10-172008-010167-9317https://imec-publications.be/handle/20.500.12860/13670A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on siliconJournal article