Palov, A.A.PalovVoronina, E.E.VoroninaLopaev, D.D.LopaevMankelevich, Y.Y.MankelevichRakhimova, T.T.RakhimovaZyryanov, S.S.ZyryanovProshina, O.O.ProshinaBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25726Interaction of atomic fluorine with porous low-k SiCOH films: modelingOral presentation