Passivation of a metal contact with a tunneling layer

Loozen, XavierXavierLoozenLarsen, Jakob B.Jakob B.LarsenDross, FredericFredericDrossAleman, MonicaMonicaAlemanBearda, TwanTwanBeardaO'Sullivan, BarryBarryO'SullivanGordon, IvanIvanGordonPoortmans, JefJefPoortmans2021-10-202021-10-2020121876-6102https://imec-publications.be/handle/20.500.12860/21061Passivation of a metal contact with a tunneling layerJournal articlehttp://dx.doi.org/10.1016/j.egypro.2012.05.010