Schmitz, AndreasAndreasSchmitzSterken, TomTomSterkenRenaud, MichaelMichaelRenaudFiorini, PaoloPaoloFioriniPuers, BobBobPuersVan Hoof, ChrisChrisVan Hoof2021-10-162021-10-162005-11https://imec-publications.be/handle/20.500.12860/11174Piezoelectric scavengers in MEMS technology: fabrication and simulationProceedings paper