MULTI-FREQUENCY IMAGING WITH A CMOS COMPATIBLE SCANDIUM DOPED ALUMINUM NITRIDE PMUT ARRAY

Billen, MargoMargoBillenGao, HangHangGaoMarigo, EloiEloiMarigoSoundara-Pandian, MohanMohanSoundara-PandianTabruyn, DriesDriesTabruynHelin, PhilippePhilippeHelinRochus, VeroniqueVeroniqueRochus2022-03-162022-03-1620211084-6999WOS:000667731600226https://imec-publications.be/handle/20.500.12860/39450MULTI-FREQUENCY IMAGING WITH A CMOS COMPATIBLE SCANDIUM DOPED ALUMINUM NITRIDE PMUT ARRAYProceedings paper10.1109/MEMS51782.2021.9375183978-1-6654-1912-3WOS:000667731600226