Polysilicon encapsulated LOCOS for deep submicron CMOS lateral isolation

Badenes, GonçalGonçalBadenesRooyackers, RitaRitaRooyackersDe Wolf, IngridIngridDe WolfDeferm, LudoLudoDeferm2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1063Polysilicon encapsulated LOCOS for deep submicron CMOS lateral isolationProceedings paper