Cotrin Teixeira, RicardoRicardoCotrin TeixeiraDe Munck, KoenKoenDe MunckDe Moor, PietPietDe MoorBaert, KrisKrisBaertSwinnen, BartBartSwinnenVan Hoof, ChrisChrisVan HoofKnüttel, AlexsanderAlexsanderKnüttel2021-10-162021-10-162007-09https://imec-publications.be/handle/20.500.12860/11907Stress analysis on ultra thin ground wafersProceedings paper