The influence of AlN nucleation layer on Radio Frequency (RF) transmission loss of GaN-on-Si structure

Chang, ShaneShaneChangZhao, MingMingZhaoSpampinato, ValentinaValentinaSpampinatoFranquet, AlexisAlexisFranquetHein, DoDoHeinUedono, AkiraAkiraUedonoChang, LiLiChang2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32684The influence of AlN nucleation layer on Radio Frequency (RF) transmission loss of GaN-on-Si structureMeeting abstract