Si nanowire growth with non-Au catalysts by plasma enhanced chemical vapour deposition

Iacopi, FrancescaFrancescaIacopiVereecken, PhilippePhilippeVereeckenMoelans, NeleNeleMoelansBlanpain, BartBartBlanpainDetavernier, ChristopheChristopheDetavernierGriffiths, HefinHefinGriffiths2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12328Si nanowire growth with non-Au catalysts by plasma enhanced chemical vapour depositionOral presentation