Werner, M.M.Wernervan den Berg, J.A.J.A.van den BergArmour, D.G.D.G.ArmourVandervorst, WilfriedWilfriedVandervorstCollart, E.H.J.E.H.J.CollartGoldberg, R.D.R.D.GoldbergBailey, P.P.BaileyNoakes, T.C.Q.T.C.Q.Noakes2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9910Damage accumulation and dopant migration during shallow As and Sb implantation into SiJournal article