Doise, JanJanDoiseBekaert, JoostJoostBekaertChan, BTBTChanHong, Sung EunSung EunHongLin, GuanyangGuanyangLinGronheid, RoelRoelGronheid2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26567Influence of template fill in grapho-epitaxy DSAProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2508809