Sioncke, SonjaSonjaSionckeVanherle, WendyWendyVanherleArt, WimWimArtCeuppens, JorisJorisCeuppensIvanov, TsvetanTsvetanIvanovLin, DennisDennisLinDelabie, AnneliesAnneliesDelabieConard, ThierryThierryConardStruyf, HerbertHerbertStruyfDe Gendt, StefanStefanDe GendtCaymax, MattyMattyCaymaxCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23096Si cap passivation for Ge nMOs applicationsMeeting abstract