Effect of Si surface roughness on the current-voltage characteristics of ultra-thin gate oxides

Houssa, MichelMichelHoussaNigam, TanyaTanyaNigamMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2643Effect of Si surface roughness on the current-voltage characteristics of ultra-thin gate oxidesOral presentation