The Viscosity of Amorphous Pd-Si and Pd-Si/Pd-Si-Fe Multilayers Determined from Stress Relaxation in Thin Films on a Substrate

Witvrouw, AnnAnnWitvrouwSpaepen, F.F.Spaepen2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/464The Viscosity of Amorphous Pd-Si and Pd-Si/Pd-Si-Fe Multilayers Determined from Stress Relaxation in Thin Films on a SubstrateJournal article