Second-harmonic generation as characterization tool for Ge/passivation layer interfaces

Vanbel, MaartenMaartenVanbelDelabie, AnneliesAnneliesDelabieSioncke, SonjaSonjaSionckeAdelmann, ChristophChristophAdelmannAfanasiev, ValeriValeriAfanasievLocquet, Jean-PierreJean-PierreLocquetVan Elshocht, SvenSvenVan ElshochtCaymax, MattyMattyCaymaxVerbiest, ThierryThierryVerbiest2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21729Second-harmonic generation as characterization tool for Ge/passivation layer interfacesProceedings paper