Patterning challenges in 193i-based tip to tip in N5 interconnects

Briggs, BasoeneBasoeneBriggsVersluijs, JankoJankoVersluijsBoemmels, JuergenJuergenBoemmelsWilson, ChrisChrisWilsonTokei, ZsoltZsoltTokeiMallik, ArindamArindamMallikSoethoudt, JobJobSoethoudt2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30329Patterning challenges in 193i-based tip to tip in N5 interconnectsProceedings paperhttps://ieeexplore.ieee.org/document/8369254