Shi, XiaopingXiaopingShiSchaekers, MarcMarcSchaekersBrus, StephanStephanBrusZhao, ChaoChaoZhaoBrijs, BertBertBrijsYu, HongYuHongYuYuKottantharayil, AnilAnilKottantharayil2021-10-162021-10-162005-10https://imec-publications.be/handle/20.500.12860/11195Deposition of Poly-SiGe with RTCVDProceedings paper