Van Meirhaeghe, R. L.R. L.Van MeirhaegheGoubert, L.L.GoubertFiermans, L.L.FiermansLaflère, W. H.W. H.LaflèreCardon, F.F.CardonDe Dobbelaere, PeterPeterDe DobbelaereVan Daele, P.P.Van Daele2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/951An XPS study of the effects of semiconductor processing treatments used to make InP optoelectronic devicesProceedings paper