Critical pattern behavior at nanometer scale vicinity of black border

Kovalevich, TatianaTatianaKovalevichBekaert, JoostJoostBekaertWiaux, VincentVincentWiauxLiddle, JackJackLiddleDavydova, NataliaNataliaDavydovaTien, Ming-ChunMing-ChunTien2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33326Critical pattern behavior at nanometer scale vicinity of black borderOral presentation