Rudenko, TamaraTamaraRudenkoCollaert, NadineNadineCollaertDe Gendt, StefanStefanDe GendtKilchytska, V.V.KilchytskaJurczak, GosiaGosiaJurczakFlandre, DenisDenisFlandre2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11140Effective mobility in FinFET structures with HfO2 and SiON gate dielectrics and TaN gate electrodeJournal article