Petersen, Dirch H.Dirch H.PetersenHansen, OleOleHansenHansen, Torben M.Torben M.HansenBoggild, PeterPeterBoggildLin, RongRongLinKjaer, DanielDanielKjaerNielsen, Peter F.Peter F.NielsenClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstRosseel, ErikErikRosseelBennett, Nick S.Nick S.BennettCowern, Nick E.B.Nick E.B.Cowern2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16011Review of electrical characterization of ultra-shallow junctions with micro four-point probesProceedings paper