Ercken, MoniqueMoniqueErckenAltamirano Sanchez, EfrainEfrainAltamirano SanchezBaerts, ChristinaChristinaBaertsBrus, StephanStephanBrusDe Backer, JohanJohanDe BackerDemand, MarcMarcDemandDelvaux, ChristieChristieDelvauxHoriguchi, NaotoNaotoHoriguchiLocorotondo, SabrinaSabrinaLocorotondoVandeweyer, TomTomVandeweyerVeloso, AnabelaAnabelaVelosoVerhaegen, StafStafVerhaegen2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15279Challenges building a 22nm node 6T-SRAM cell using immersion lithographyProceedings paper