Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach

Palov, AAPalovVoronina, EEVoroninaRakhimova, TTRakhimovaLopaev, DDLopaevZyryanov, Sergey M.Sergey M.ZyryanovMankelevich, YuYuMankelevichKrishtab, MikhailMikhailKrishtabBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-2320161071-1023https://imec-publications.be/handle/20.500.12860/27113Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approachJournal articlehttp://scitation.aip.org/content/avs/journal/jvstb/34/4/10.1116/1.4946838