MBE growth of BaTiO3 on Ge/Si and SrTiO3/Si pseudosubstrates for electro-optical modulators integration on silicon

Hsu, MarkMarkHsuPantouvaki, MariannaMariannaPantouvakiMerckling, ClementClementMercklingEl Kazzi, SalimSalimEl KazziVan Campenhout, JorisJorisVan CampenhoutAbsil, PhilippePhilippeAbsilVan Thourhout, DriesDriesVan Thourhout2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25396MBE growth of BaTiO3 on Ge/Si and SrTiO3/Si pseudosubstrates for electro-optical modulators integration on siliconMeeting abstract