Improvement of thermal stability in high density Ta2O5 3D capacitor by additional thin SiO2 layer

Detalle, MikaelMikaelDetalleDekkers, HaroldHaroldDekkersPotoms, GoedeleGoedelePotomsPhommahaxay, AlainAlainPhommahaxaySabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanSoussan, PhilippePhilippeSoussanBeyer, GeraldGeraldBeyer2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18833Improvement of thermal stability in high density Ta2O5 3D capacitor by additional thin SiO2 layerMeeting abstract